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In this paper, a micro/nano displacement sensor for PZT actuator which could measure the minute displacement in micron or nanometer level has been proposed. This paper focus on the whole process of this novel sensor from the working principle, parameter determination to the FEM simulation and so forth. This sensor can enlarge the displacement of the PZT by utilizing the lever principle and the strain...
Micro displacement measurement of the PZT actuator is a micro sensor which could measure the minute displacement in micron or nanometer level. In general, the sensor is required to accommodate little space in order to save the room of measuring device. In this paper, a mechanical micro displacement sensor with smaller volume has been proposed. This paper focus on the whole process of this novel sensor...
A novel generation of micro/nano displacement sensor for PZT actuator which could measure the minute displacement in micron or nanometer level has been performed in this paper. In general, the former two generations of sensor at IIM have been fabricated and tested successfully. In this paper, a new generation micro/nano displacement sensor with higher resolution has been proposed. This paper focus...
Micro displacement measurement of the PZT actuator is a micro sensor which could measure the minute displacement in micron or nanometer level. In general, the sensor is required not to accommodate much space in order to save the room of measuring device. In this paper, a mechanical micro displacement sensor with smaller volume has been proposed. This paper focus on the whole process of this novel...
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