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This letter presents the design of a micromechanical oscillator based on a vertically coupled (VC) CMOS-microelectromechanical systems (MEMS) resonator pair for phase noise reduction. The prototyped resonator pair consists of two vibrating plates coupled with each other, thus providing enhanced power handling while keeping compact footprint. The proof-of-concept oscillator based on a 6.5-MHz, VC mode...
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