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Aluminum Nitride (AlN) based Surface Acoustic Wave (SAW) sensors have shown great application potentials on serving as biosensors. In this paper, we investigate the mass sensitivity of SAW sensors, which were fabricated based on Si/AlN structure by depositing aluminum oxide (AhO3) thin films on the active area between the input port and output port of the SAW devices. The material of the IDTs is aluminum...
The Aluminum Nitride (AlN) thin film based surface acoustic wave sensors have been fabricated by whole CMOS compatible process. In order to study the resonant frequency behavior responses with temperature, S parameters measured by network analyzer of the AlN SAW sensors are processed with the data extraction program through MATLAB software. It is observed the extracted data of resonance frequency...
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