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A novel hybrid magnetic suspension actuator (HMSA) that can be used for positioning applications with sub-micron resolution and millimeter range has been developed. The proposed actuator can generate levitation with reduced power consumption by using permanent magnets to provide repulsive force and a coaxial coil for the attractive force. It will enable modular implementation of millimeter-range multi-DOF...
A six DOF positioning stage that can provide both millimeter range of motion and high accuracy is presented. The proposed solution is based on the use of hybrid maglev actuators to control each DOF, integrated by a decoupling sliding mode controller in combination with a modified passive nonlinear observer. Simulation shows that high accuracy multi-axis motion can be achieved. The workspace of the...
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