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Electromagnetic acoustic transducer (EMAT) is a kind of non-contact ultrasonic transducer, and during its operation, no liquid coupling is required. Despite this advantage, EMAT has low transduction efficiency and its performance depends on the tested object, thus further research of its complex multiphysics transduction mechanism involving both electromagnetic and elastodynamic phenomena is paramount...
Structural accuracy is one of the most concerned issues in micro fabrication, for its significant impact on the system performance. In this paper, the pattern transfer accuracy in proximity UV-lithography is investigated according to the partial coherent light theory. Based on the complex degree of coherence for any two points on the mask plane, a mathematical model is constructed to analyze the propagation...
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