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This paper presents a novel application of a flexible piezoelectric film sensor to non-invasive fault diagnosis of industrial pipe systems. This sensor is made of oriented aluminum nitride (AlN) thin film, and the total thickness is less than 40 mum. Flexibility of this sensor facilitates installing to surfaces of pipes. Using this sensor, pressure pulsation in pipe systems and vibration of pipe walls...
We have developed an ultrasonic probe with a film-type pressure sensor installed on its contact surface. The film-type pressure sensor, which uses aluminum nitride (AlN) as a piezoelectric material, is thin, flexible, durable and heat-resistant. The AlN is deposited on a polyimide film in high orientation using the sputtering method. The sensor can measure contact pressure directly, with little effect...
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