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Nanoindentation creep tests were carried out at the maximum indentation load from 500 to 9000μN to study the indentation size effect (ISE) on the creep behavior of amorphous, nanocrystalline (NC) bcc and NC tetragonal Ta films. For NC bcc and tetragonal Ta films, the creep strain rate ε˙ decreases and stress exponent n increases with enhanced peak loads or indent depth, and are therefore both indentation...
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