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Amorphous Si:C:O:H films were fabricated at low temperature by C 2 F 6 and O 2 /C 2 F 6 plasma treating silicone oil liquid. The a-Si:C:O:H films fabricated by C 2 F 6 plasma treatment exhibited white photoluminescence at room temperature, while that by O 2 /C 2 F 6 plasma treatment exhibited blue photoluminescence. Fourier...
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