The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Recently, there has been tremendous interest in near-field optical lithographic techniques for gigabyte portable information storage devices. The near-field optical lithographic technique will circumvent the classical diffraction limit and therefore can provide sub-wavelength-size patterns. For a potential near-field optical probe, a novel technique for the nano-fabrication of sub-wavelength-size...
Abstract. For electron beam nanolithography and scanning electron microscopy applications, an electrostatic electron lens system called a microcolumn must be assembled. In order to reduce aberrations, laser drilling of the assembled microcolumn system should be highly beneficial. We have drilled micron-size apertures on silicon substrates including molybdenum and tantalum using a 1.064m Nd:YAG laser...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.