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MEMS devices based on bimorphs are affected by several effects including creep, stress, and fracture in bimorph structures. In this paper, we present the reliability study of an S-shaped bimorph MEMS mirror. The following tests are performed: 100 million cycle scanning, vibration, and isothermal holding. Only 0.4% scan angle change was observed after experiencing a 6-axis, 20g vibration. A maximum...
One time radial vibration, mostly caused by rotary eccentric load, may reduce the reliability and operating life of motors. In order to mitigate the one time radial vibration in permanent magnet motors, a real time detection method for rotary eccentric load based on the theoretical analysis of the motor vibration and the mechanical analysis was given, and a novel control strategy based on FOC (field...
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