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A damage detection and assessment system based on laser-induced changes in surface scattering is reported. It is integrated with a 1064nm, 532nm, 355nm damage test facility used for routine testing of production optics. HfO2/SiO2 HR-coating and HfO 2/SiO2 AR-coating were tested by this system, and compared with plasma spark method and Nomarski phase contrast microscope method. The results show He-Ne...
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