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In this paper, we improve the previous results for a bi-axial large stroke beam-flexure nano-manipulating servo stage by an optimized design. By means of elliptical integrals, the analytical results of the undesired motions of the key kinematic decoupling component (i.e. Π-shaped beam flexures) can be obtained, and then a set of optimized geometric parameters is provided. The overall design significantly...
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