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Nanolayered metal-ceramic composite systems provide the possibility to produce new materials with exceptional strength, toughness, and radiation resistance not exhibited by their individual constituents. The unusual behaviors are frequently attributed to the high density of internal interfaces. Most layered structures studied to date contain sharp interfaces and the synthesis of more diffuse interfacial...
A thorough understanding of ion-solid surface interactions is important for the predictive modeling of ionized metal plasma (IMP) Cu physical vapor deposition (PVD) at feature scales. Besides sticking coefficients and sputter yields, characterizations such as angular distributions of sputtered and reflected particles, and thermal-accommodation coefficients are also needed as inputs for a feature scale...
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