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Niobium titanium nitride (NbTiN) thin films were deposited on a selection of different substrates to explore the optimum depositing condition of high-quality NbTiN thin films. The NbTiN films deposited on MgO, Al2O3, and fused quartz substrates showed excellent superconducting properties with a high TC of 14.7 K, 14.5 K, 15.2 K, and low resistivity ρ20 K of 55 μΩcm, 116 μΩcm, 78 μΩcm, respectively...
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