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This work investigated microstructure and hydrogen impermeability of titanium nitride (TiNx) thin films deposited on tantalum substrate by direct current reactive magnetron sputtering. The influence of N2 flow rate and cathode current on grain size, crystal orientation and chemical state of the films was studied. It is found that when N2 flow rate increases from 5 to 10 and 15 sccm (standard cubic...
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