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Diamond-like carbon (DLC) films were synthesized on silicon substrates from solid carbon by a very low power (∼60 W) microwave plasma chemical vapor deposition (MPCVD) reaction of a mixture of 90–70% helium and 10–30% hydrogen. It is proposed that He+ served as a catalyst with atomic hydrogen to form an energetic plasma. The average hydrogen atom temperature of a helium-hydrogen plasma was measured...
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