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Uniform amorphous tungsten cone arrays in high density were fabricated by Ar + reduction etching of WO 3 nanowire film. The etching process was performed in the analysis chamber of an X-ray photoelectron spectroscopy (XPS) system. SEM and TEM results revealed that the tip radius of the etched cones was 10nm, and the cones were amorphous with a high aspect ratio of over 250. XPS analysis...
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