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Laser damage to fused silica continues a main issue of high-power/energy laser systems. HF-based etching technique is known to mitigate laser damage initiation and growth under UV laser illumination. The responses of material surface properties, especially surface damage characteristics to various etching parameters are questioned in the article. Fused silica was submerged into HF-based etchants (HF,...
The depth and morphology of subsurface damage (SSD) in fused silica samples ground with diamond grinding wheels were investigated. The factors possibly influencing the SSD depth of ground samples were examined. The results demonstrate that the SSD depth is most responsive to diamond grit size while the processing parameters (i.e. depth of cut, feed rate, and wheel peripheral speed) have marginal effects...
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