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Electrostatics especially electrostatic force (ESF) plays vital role in a variety of fields, concerning applications in colloid, plasma, and micro/nano device driving. The behaviors of ESF under different conditions were studied both by simulation and experiment in this paper. Voltages or charges were set to spheres of several materials, in order to explore how ESF was influenced by the electric condition...
Low temperature process is important for capacitive micromachined ultrasonic transducers (CMUTs) to integrate with integrated circuits (ICs) in order to reduce parasitic capacitance and improve its device performance. This paper presents a novel low temperature fabrication technology for CMUTs. Transition metal layers (the Ti/Au layer and Ti/Sn/Au layer) were used for bonding between the silicon substrate...
This paper presents the design, fabrication and test of a triaxial cutting force dynamometer based on MEMS (micro-electro-mechanical system) technology. MEMS chip was utilized as transition element of the designed dynamometer because of its excellent sensitivity, favorable accuracy and high integration. In order to measure triaxial cutting forces, an innovative structure of two mutual-perpendicular...
A piezoresistive force transmitter has been developed for gauging the variation of yarn's linear density with the measuring range of 0–5 N and the corresponding voltage output of 0– 5 V. The transmitter simply consists of a force sensor head and a signal processing circuit unit. The sensor head consists of a sensitive silicon chip and an elastic metal element. The chip is based on piezoresistive...
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