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A micromachined cantilever-based flow sensor is designed, depending on the detection of surface strain on the cantilever caused by the mass flow. In the continuous flow mode, the deflection of cantilever is directly proportional to the flow rate. The working mechanism of the strain beam in the flow sensor is analyzed, and the finite element method(FEM) is used to investigate the structural deformation...
A novel dc current sensor based on magnetically actuated resonant piezoresistive microcantilever is proposed. The sensor measures the dc current by detecting the shift of resonant frequency of the microcantilever. A detailed theoretical study on the relationship between the current and the cantilever's resonant frequency is also given. To reduce force and displacement noise, the microcantilever works...
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