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Using a cosputtering technique to deposit P-ZnO : AlN film and using a vapor cooling condensation system to deposit n-ZnO : In and i-ZnO films on sapphire substrates, thin-film-type ZnO-based light-emitting diodes (LEDs) were fabricated. A Nd : YAG laser with a wavelength of 413 nm is utilized to identify the defect-related emissions of p-ZnO, i-ZnO, and n-ZnO films. The characteristics of i-ZnO layer...
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