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We fabricated 16 times 16 format arrays of 180 mum square Ti/Au superconducting transition edge X-ray microcalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber...
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