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We report the characterization of a soft x-ray plasma source generated by a long-pulse XeCl excimer laser system. The output energy is 4 J at a wavelength of 308 nm in a 100-ns pulse. The intensity of radiation on target is estimated to be 4 × 10 12 W cm −2 . X-ray emission spectra of the plasma have been recorded using a double focusing spatial resolution spectrometer with a spherical...
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