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A novel planar motion stage superposed with two magnetic suspension vehicles has been presented in this paper. The stage is a micro-electromechanical device which can widely be used in semiconductor manufacturing, printed circuit board processing, micro-assembling system, etc. The kinematics and dynamic models of the stage show that it is a highly coupled system. The decoupled control of the system...
The construction and design of a mixed magnetic bearing with 5 DOFs (degree-of-freedoms) is introduced in this paper. The bearing can be stabilized in all five DOFs by only one DOF feedback control in the axis direction, the other DOFs are controlled passively by permanent magnetic bearings. The carrying stiffness matrix of the bearing is calculated and its stability characteristics are analyzed....
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