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Monolithically integrated planar front-illuminated InGaAs dual pin photodiodes (PD) with a series resistance less than 10 Omega have been fabricated for optical coherent receiver application. The PDs exhibit a very low dark current around 100 pA at -10 V, a high quantum efficiency (over 90%) and a 3 dB bandwidth of more than 10 GHz. The photosensitive area diameter is 50 mu m/sup 2/, which offers...
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