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This study demonstrates the magnetostatic torsional actuator consisting of a Si-Ni compound frame to significantly improve the driving force. The present design has three merits: (1) employ Si mold to simultaneously electroplate/pattern thick Ni, and the Ni and Si structures respectively provide magnetostatic force and superior mechanical properties, (2) the embedded Ni structures not only increase...
This study demonstrates the torque-enhancement design for magnetostatic actuators driven by double-side electroplating ferromagnetic film. The present design has two merits: (1) the backside electroplating of the ferromagnetic film increases the magnetostatic torque, (2) the slender ferromagnetic material patterns with higher length-to-width ratio enhance the magnetostatic torque. The actuator is...
This paper reports on novel coilless microscanning mirrors driven by the magnetostatic force that resulted from a magnetic interaction as well as the Lorentz force that is induced by an eddy current. This eliminates complicated coil routing and insulation layer deposition and simplifies fabrication allowing easy integration with micromachining and complementary metal-oxide-semiconductor processes...
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