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In scaling-up Carbon Nanotubes (CNTs) array manufacturing, the uniformity of CNTs' height, or flatness of array, is critical for the yield of nanodevices fabricated from CNTs, and thus needs to be properly controlled. However, since the flatness of the CNTs array is better characterized by a profile, the conventional run-to-run (R2R) controllers that are designed for a single or multiple quality indicators...
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