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Deep-submicron In0.7Ga0.3As buried-channel MOSFETs with various gate lengths down to 40 nm are demonstrated. In0.7Ga0.3As buried-channel MOSFETs were fabricated on an epitaxial wafer using an InP/In0.52Al0.48As double barrier. The device characteristics were analysed, including subthreshold swing, transconductance and drive current. Good scaling behaviour was observed for these III-V MOSFETs. For...
This paper compares device performance for In0.53Ga0.47As MOSFETs using single HfO2 gate dielectric with stacked gate dielectrics using various interfacial layers between HfO2 and In0.53Ga0.47As substrate including Al2O3, HfAlOx, LaAlOx, and LaHfOx. Of the gate stacks studied, Al2O3/HfO2, HfAlOx/HfO2, and LaAlOx/HfO2 bilayer gate dielectrics exhibit lower subthreshold swing, higher drive current and...
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