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Tantalum nitride (TaN) films were deposited onto SiO2/Si and multilayer ceramic (MLC) substrates with a reactive direct current magnetron sputtering method. After they were kept at different N2 partial pressures and substrate temperatures, these were characterized for their electrical, structural, and mechanical properties for use as thin film resistors (TFRs). Results of X-ray diffraction analysis,...
For the second qualification of the First Wall (FW) procurement of the International Thermonuclear Experimental Reactor (ITER), a semi-prototype of the FW has been designed with increased local surface heat flux up to 5MW/m 2 . With the given conditions, the new semi-prototype design was simulated with the commercial CFD code, the ANSYS-11. The results show that the semi-prototype temperature...
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