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This paper presents a 5-axis motion sensor which can detect 3-axis acceleration and 2-axis angular rate using resonant electrostatic driving and non-resonant capacitive detection mode. This sensor is fabricated by silicon on insulator (SOI) bulk-micromachining, and is vacuum sealed by anodic bonding and activation of the non-evaporated getters (NEG). The sensor chip size is 5.0×5.0×1.7mm 3 ...
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