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For the first time, we have realized electret that can be used in the liquid environment toward better performance of electret-based generators and actuators. By using super-lyophobic overhanging pillar surface, stable Cassie-Baxter (C-B) state is sustained even with low-surface-tension hexadecane liquid and with high surface potential. Pillar surface with a SiO2 electret layer has been successfully...
We have developed a facile, versatile and low-cost fabrication method for high-performance superlyophobic surfaces (SLS, simultaneously superhydrophobic and superoeleophobic) on curable materials, which is promising to unblock the two bottlenecks of SLS (relying on very few materials and requiring demanding fabrication). By using poly(dimethylsiloxane) (PDMS) as the elastomer mold, T-shape microstructures...
In this paper, we propose MEMS-based all-polymer piezoelectret for vibration-driven energy harvesting. With trench-filled cellular parylene electret charged with soft X-ray, output power of 75 nW has been obtained by the microfabricated piezoelectret energy harvester at the resonant frequency of 149 Hz and 1.5 g acceleration. We also propose an improved cellular polymer structure with embedded PEDOT...
We propose a novel low-voltage droplet manipulation method ??liquid dielectrophoresis on electret (L-DEPOE)?? with superlyophobic surfaces (SLS), which enable high contact angle and low flow friction for water and oil. Charge stability of electret in liquid is much improved with new polymer coating, and SLS with electrodes are successfully fabricated, showing high mechanical robustness and extreme...
Ti-coated Si microcavities with extremely-smooth sidewalls has been developed using DRIE and vacuum arc evaporation for improvement of energy conversion efficiency of micro thermophotovoltaic system. For 1.8 ??m microcavities, the peaks in emittance spectra correspond well to the electromagnetic resonance modes. Micro cavities designed for Ge photovoltaic cells are also successfully microfabricated...
A MEMS electret generator with nonlinear spring has been developed for energy harvesting applications. By using hybrid high-aspect-ratio parylene springs, a large-amplitude oscillation over 1.0 mmp-p has been obtained in a broad frequency range of 46-73 Hz. By using our mechanical model of the nonlinear spring, we have confirmed that the model can mimic frequency response of the mass-spring system...
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