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A novel vertical actuator based on electrowetting on dielectric (EWOD) was designed, analyzed and simulated. Modeling results indicated that the vertical driving force of the actuator obeyed a second order polynomial of applied voltage, which was verified by Covent_ware 2006. As a result, the vertical driving force of the EWOD actuator with a 1.1nL droplet and a 1.75 μm thick polymer was about 0.5 μN...
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