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A split-nanobeam optomechanical crystal cavity is proposed. By adjusting the split width, an ultra-small effective motion mass as small as 5.2fg is realized with a high mechanical frequency of 7.55GHz.
An optomechanical crystal nanobeam cavity with high optomechanical coupling rate is proposed and fabricated. Only by adjusting the radius of the air holes, the cavity realizes an optomechanical coupling rate as high as 1.24 MHz.
A hetero optomechanical crystal nanobeam cavity with high mechanical frequency of 5.88 GHz is proposed. By enhancing the overlap between optical and strain field, an optomechanical coupling rate as high as 1.31 MHz is achieved.
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