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In this paper, a novel low cost process for preparing wafer-level spherical Rb vapor cell for miniature atomic clocks is presented. The process is studied experimentally, which consists of the following steps: 1) small cavities A (for reactants) interconnected with large cavities B (working chamber) and channels are wet etched simultaneously on one side of a silicon wafer; 2) foaming agents and chemicals...
A glass microfluidic device integrated with ultrasonic resonators prepared by a Chemical Foaming Process is presented in this paper. The fabrication of the microfluidic device including glass micro cavities and channels with ultrasonic resonators integrated was introduced firstly. By the CFP process, micro glass cavities and channels were simultaneously shaped on a glass wafer. Then, vibration tests...
This paper reports an innovative molding process for the fabrication of low cost wafer-level micro-lens array with spacers of optical applications. The concave mold for the micro-lens includes two parts: the upper glass mold and the under silicon mold. The upper glass mold was prepared by combining the Hot Forming Process (HFP) and the Chemical Foaming Process (CFP). The under silicon mold was prepared...
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