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Barium strontium titanate (BaxSr1-x)TiO3 films are expected to be utilized for microwave integrated circuit devices; therefore, the preparation of highly crystalline BST films has been investigated. In this study, we attempted to prepare (BaxSr1-x)TiO3 films on MgO and sapphire substrates by sputtering under various conditions. It was revealed that BST films could be obtained at lower substrate temperatures...
Ferroelectric lead zirconium titanate (PZT) has been used in FeRAMs, which are expected to become common large capacity devices. We have extensively studied PZT thin films and their micro-processing. However, there are several problems of degradation by crystal defects at grain boundaries in thin films and surface damage by microfabrication. Self-assembled nanocrystals are useful for solving these...
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