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We propose a new method for activation of source/drain junctions by microwave annealing. A study with B/BF2 implants at ultralow energies (300/500 eV) and high doses (1E15/5E15 cm−2) was completed. The samples were subjected to a high-power cyclotron resonance maser, called a “gyrotron,” for annealing. There appears to be some evidence of electromagnetic field-aided activation. The activation levels...
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