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Dense AlN ceramics with a thermal conductivity of 180W/m.K were obtained at the sintering temperature of 1750 o C using CaF 2 and YF 3 as additives. At temperatures below 1650 o C, the shrinkage of AlN ceramics is promoted by liquid (Ca,Y)F 2 and Ca 12 Al 14 O 32 F 2 . Liquid CaYAlO 4 mainly improves the...
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