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For the first time, this paper demonstrates the cancellation of nonlinear response in weakly coupled resonators. It has been observed that by working in the region where the mechanical nonlinearity of the resonators and the electrical nonlinearity of the electrostatic coupling cancel, the output current amplitudes are increased by 4x while the trend of vibration amplitude variation upon stiffness...
This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems (MEMS) resonant sensing device consisting of three weakly coupled resonators with enhanced sensitivity to stiffness change. If one resonator of the system is perturbed by an external stimulus, mode localization occurs, which can be detected by a change of modal amplitude ratio. The perturbation can be, for example,...
The mode-localization effect exhibited in electrostatically-coupled microelectromechanical systems (MEMS) resonators was demonstrated using a pair of rectangular clamped-clamped beams that were fabricated using a silicon-on-insulator (SOI) based process. The response of the amplitude ratio of the resonating beams at the fundamental mode frequencies to a change in the stiffness of one of the beams...
This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator,...
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