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This paper describes a new nano-patterning technique, the UV-Kiss Metal Transfer (UV-KMT) method, and applies it for patterning micro/nano-structures on AlGaInP light-emitting diodes (LEDs) for enhancing their light extraction efficiency. First of all, an ETFE mold with micro/nano-features is replicated from a silicon master mold. A thin metal film is then deposited on the ETFE mold which has very...
The authors report the development of a new contact imprinting method which can transfer metallic nano-patterns directly from a silicon mold to a substrate, with the help of an infrared pulse laser heating. This new technique integrates the strengths of both soft imprinting lithography and laser assisted imprinting method. It utilizes a Nd:YAG pulse laser of a wavelength 1064 nm to penetrate and heat...
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