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This paper reports a novel approach to fabricate poly-methyl-meth-acrylate (PMMA) electrostatic comb-drive actuator using the deep X-ray lithography (DXRL) technique. The designed actuator consists of 140 units of interdigitated parallel capacitors with the finger gap and width being 2mum and 4mum respectively, and the thickness of the structure is 200 mum, which makes the aspect ratio 50:1. A brief...
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