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Probe calibration is the basis of accurate atomic force microscope (AFM) measurement. In white light interference based AFM (WLI-AFM), the relationship between the vertical displacement of probe and the position of the interference fringes on probe cantilever should be calibrated for accurate measurement. In this paper, a traceable probe calibration method for WLI-AFM is proposed. A high resolution...
The dynamic characteristics of an atomic force probe are important for rapid and accurate measurement in white light interference (WLI) based atomic force microscope (AFM). The tip of the probe will fly from the surface when its dynamic characteristics are poor, which will cause measurement error. Generally such tip flight can be avoided by reducing the scanning speed, which will decrease the error...
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