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In this work, the Zn0.96-x−yMgxBeyGa0.04O films co-doped with different Mg and Be doping levels of 3 ∼10at.% were prepared using an RF magnetron sputtering, and the correlation between the film properties and the doping levels was investigated. With an increase in Mg or Be doping level, the film crystal quality gradually deteriorated and the ZnO c-axis parameter was contracted or expanded due to the...
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