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A bulk micromachined gyroscope fabricated with an improved process flow is measured systematically. It achieves good performance at atmosphere. The driving resonant frequency is 1663.5Hz with a quality factor 195, and the sensing resonant frequency is 1677Hz with a quality factor 200. The R2-nonlinearity is 0.008% within the range of ±43°/s, which is limited by the digital to analogue converter, with...
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