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SiO 2 thin films containing nanocrystalline Si (nc-Si) and Er ions have been fabricated by using a metal vapor vacuum arc (MEVVA) ion source. Photoluminescence (PL) properties of the films were studied as the function of the Er ion dose. The PL intensity was found to be strongly enhanced by incorporating nc-Si in the films. The intensity of the 1.54 μm luminescence peaks firstly increases...
In this work, SiO 2 thin films containing Er and Si nanocrystals were prepared by implantation with a metal vapor vacuum arc (MEVVA) ion source. Photoluminescence (PL) properties of the films at 77 K and at room temperature (RT) were studied as functions of the Si ion dose. The PL intensities were strongly enhanced by the incorporation of nanocrystalline Si (nc-Si) in the SiO 2 films...
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