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In this study, a gas pressure sensing device based on stainless steel diaphragm and titanium substrate for use at harsh environment is presented. To illustrate these principles, array type capacitive gas pressure sensors based on a stainless steel and titanium have been designed and fabricated. For the fabrication of the sensor, both of bulk and surface micromachined techniques are used with conventional...
This paper investigates multiarrayed (6 times 6) sensors based on laminated stainless steel membrane on the stainless steel substrate. For the fabrication of those sensors, micromachining techniques are combined with lamination process techniques. For the lamination between diaphragm and substrate, hot pressing technique is used with epoxy resin. The finite-element method is adopted to investigate...
In this paper, electro-mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been investigated as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless...
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