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This paper presents the use of the Least Square Support Vector Machines (LS-SVM) technique, combined with the Finite Element Method (FEM), to characterize small cracks in order to get a fast non-destructive inspection. The LS-SVM is a statistical learning method that has good generalization capability and learning performance. LS-SVM trained model is proposed to predict crack sizing using experimental...
This paper presents a high-performance interface for eddy current displacement sensors, intended for use in IC fabrication equipment. The interface consists of a low-power front-end oscillator and a synchronous demodulator. With an excitation frequency of 20 MHz, it enables the use of targets with only a few tens of μm thickness. A ratio-metric measurement approach is applied to suppress the oscillator's...
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