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A ZnO thin film-based gas sensor was fabricated using a SiO 2 /Si substrate with a platinum comb-like integrated electrode and heating element. The structural characteristics, morphology, and surface roughness of the as-grown ZnO nanostructure were investigated. The film revealed the presence of a c-axis oriented (002) phase with a grain size of 20.8nm. The sensor response was tested for hydrogen...
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