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This paper presents an electret based vibration energy harvester, which has excellent performance with both broad bandwidth and high normalized power density (NPD). Wafer-level MEMS fabrication process is proposed with detailed study on the packaging pressure and air damping effect. With an overall volume of about 0.187 cm3, the harvester can generate a maximum power of 4.95 μW with bandwidth of 12...
A spray-coating method for cyclic olefin copolymer (COC) electret material with polystyrene (PS) nanoparticles is developed here. Compared with the traditional polymer electret materials, the COC electrets with PS nanoparticles achieved better surface charge stability when exposed to harsh environment at high humidity or high temperature. With the spray coating technique, they can easily control the...
In this paper, we propose the design and test of a wideband MEMS electrostatic energy harvester with a dual resonant structure based on the out-of-the-plane gap closing scheme. It is fabricated using advanced MEMS technology, and the overall size is about 13 × 18 mm2, and comparing to traditional devices with single resonant frequency, the proposed device with dual resonant structure can resonate...
In this paper, we propose an electrostatic energy harvester with an out-of-the-plane gap closing scheme. Using advanced MEMS technology, two components of the energy harvesting device are fabricated from two silicon wafers. A spray coated CYTOP polymer is used both as an electrets material and an adhesive layer for low temperature wafer bonding. The overall size of the device is about 13 × 18 mm2...
In this paper, we have proposed a spray coating method for electret material deposition. With this method, the thickness of electret can be well controlled and the surface potential of the charged electret can be improved comparing to the traditional spin coated polymer electrets. Furthermore, we have added some polystyrene nano particles into the electret, which can improve the surface charge stability...
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