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The effect of the gas mixture composition on the structure, chemical bond character and hardness of Si-B-C-N films was systematically studied. A series of Si-B-C-N films was deposited by reactive dc magnetron sputtering of the target composed of Si disc with B4C chips placed in the sputtering zone of disc. The films were deposited with nitrogen fractions 30-to-70% in Ar/N2 gas mixture and annealed...
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