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Vinyl addition norbornene polymers with phenol pendent groups are obtained by methanolysis of the 4‐acetoxyphenyl norbornene polymer. Thin films of this polymer blended with additives such as norbornene polymers with hexafluoroalcohol pendent groups and diazonaphthoquinone compounds result in linear dissolution in tetramethylammonium hydroxide developer. Good resolution, positive tone patterns are...
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